Definition of reactive plasma deposition (rpd)

1) similar to CVD, except that an rf plasma helps the decomposition / recombination process of the reactants.

Related Terms & Definitions

Here are some related terms and definitions we found for this term.

  1. Plasma
  2. Chain Reaction
  3. CVD
  4. Deposition
  5. IAD
  6. Acid-Pulse (dry deposition)
  7. electron gun
  8. physical vapor deposition (PVD)
  9. Radical

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